화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2007년 가을 (10/26 ~ 10/27, 한국과학기술원)
권호 13권 2호, p.2256
발표분야 재료
제목 Fabrication of Optofluidic Chips by Merging Photolithography and Holographic Lithography
초록 In this study, we report a new strategy of integrating holographic lithography with photo-lithography. It leads to hybrid patterns of the microchannels and 3-dimensional nanostructures which is compatible with a microfluidic platform. This hybrid structure could be applied to the optofluidic platform; the combination of the microfluidics and photonics. Holographically fabricated 3-dimensional structures have photonic band-gap property due to their structural periodicity and microfluidic channels give adaptive controllability of the refractive index. Since the photonic band-gap properties of 3-dimensonal nanostructures can be tuned by the refractive index mismatches between two different materials, it can be used as tunable waveguide and optical filters. By same principles, it can detect the chemical and bio-materials from the photonic band-gap shift. Only small amount of sample is needed in these optofluidic devices since the volume of the microfluidic channel is nanoliter scale and the sample species can be detected immediately by optical signals associated with photonic band-gaps.
저자 이승곤1, 박성규1, 문준혁2, 양승만3
소속 1한국과학기술원 / 광자유체 집적소자 창의연구단, 2삼성종합기술원, 3한국과학기술원
키워드 Photonic Crystals; Holographic Lithography; Photolithography; Microfluidics; Optofluidics
E-Mail
VOD VOD 보기
원문파일 초록 보기