초록 |
Electromagnetic interference (EMI) shielding devices was investigate using conducting materials. For example, a carbon material (ex. CNT, Graphene, composite) or 2D transition metal carbide, nano structure of transition metal (ex. Cu pattern, Ag nanowire), a conducting polymer. The conducting materials can be applied for EMI device. In this study, ITO, widely known as a transparent electrode of metal oxide, was used for flexible and transparent EMI shielding device. But, ITO is brittle material. So it hard to apply flexible device. In this study, the ITO is formed into nano-branches by high-temperature vapor deposition. This structure ensures conductivity and transmittance. Due to the structure, the ITO nano-branches can be applied to flexible devices. Since this process for branch growth is performed at a high temperature, it can’t be processed on a PDMS, which is a transparent flexible substrate. Therefore, ITO nano branch was transferred to PDMS. As the sacrificial layer was used soluble material, the transfer process is harmless and rapid. The final objective of this study is to determine the optimum conditions (ITO branch thickness, deposition temperature, etc.) for high transparent and electromagnetic shielding. |