| 학회 |
한국재료학회 |
| 학술대회 |
2014년 가을 (11/27 ~ 11/28, 대전컨벤션센터) |
| 권호 |
20권 2호 |
| 발표분야 |
A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 |
Direct photo-patternable indium zinc oxide thin-film transistors fabricated by solution process |
| 초록 |
Solution-processed photo-patternable indium zinc oxide (IZO) thin film for active layers in thin-film transistors (TFTs) was fabricated and its photo-patternability was investigated. The zinc and indium ions in precursor solutions are chemically modified by the photosensitive chelating agent, which stabilize the precursor solution and are polymerized during the UV irradiation. Direct photo-patterned IZO thin film have a fine resolution of 10 µm. The photo-patterned IZO semiconductor with an inverted-staggered structure showed good transistor performance. |
| 저자 |
Sang-Hoon Choi, Kyoung-Tae Park, Seok-Jun Seo
|
| 소속 |
Korea Institute of Industrial Technology |
| 키워드 |
Oxide Semiconductor; Thin-Film Transistor; Sol-Gel Process
|
| E-Mail |
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