| 학회 | 한국화학공학회 |
| 학술대회 | 2006년 가을 (10/27 ~ 10/28, 고려대학교) |
| 권호 | 12권 2호, p.2417 |
| 발표분야 | 재료 |
| 제목 | Periodic Holes with 10 nm Diameter Produced by Low-temperature Anodization |
| 초록 | With its high aspect ratio nanochannels, a porous anodic alumina film is a potential host for growing nanocomposites. It has been reported that long-term anodization of aluminum provides a hexagonally ordered array of nanopores with very uniform pore diameters (between 30 and 50 nm, depending on pH, acid, and potential) and pore spacings of 80 to 100 nm within a matrix of amorphous aluminum oxide. For the application to nanoelectronics, smaller diameters are highly desirable. Using the low-temperature anodization technique, we report the method for the highly-ordered anodic alumina template with diameter as smaller as 10 nm. This opens the door to numerous applications that need small but hexagonally periodic features produced without conventional lithographic process. |
| 저자 | 김태용, 김형은, 정수환 |
| 소속 | 경북대 |
| 키워드 | anodic alumina; low-temperature anodization; template |
| 원문파일 | 초록 보기 |
