| 학회 |
한국재료학회 |
| 학술대회 |
2007년 봄 (05/10 ~ 05/11, 무주리조트) |
| 권호 |
13권 1호 |
| 발표분야 |
전자재료 |
| 제목 |
The optical properties of the transparent ZnO:Ga and ZnO thin films grown by RF magnetron sputtering |
| 초록 |
Zinc oxide (ZnO) and Ga doped zinc oxide (GZO) thin films with different thicknesses are prepared on transparent glass substrate by RF magnetron sputtering. The structural properties of ZnO and GZO are investigated by using transmission electron microscopy (TEM), x-ray diffraction (XRD) measurement and atomic force microscopy (AFM). It is found that both ZGO and ZnO possess the preferred orientation along with ＜001＞ direction based on the TEM analysis. However, it is also found that grains of ZGO films are more severely elongated than those of ZnO films. Optical properties are also investigated by UV-VIS-NIR spectrophotometer. The transmittance of GZO film is higher than that of ZnO film through all of the ranges of wavelengths (200nm~1400nm). The transmission efficiency of GZO film is not decreased in UV region compared with that ZnO film. |
| 저자 |
황보수정1, 황숙현2, 전훈하1, 박치영2, 김재규1, 김금채2, 이수경1, 이지수2, 김도현1, 임재영2, 최원봉1, Ved Prakash Verma2, 전민현1
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| 소속 |
1인제대, 2나노메뉴팩처링 (연) |
| 키워드 |
ZGO; ZnO; optical; TEM
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| E-Mail |
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