| 학회 |
한국재료학회 |
| 학술대회 |
2008년 봄 (05/22 ~ 05/23, 상록리조트) |
| 권호 |
14권 1호 |
| 발표분야 |
전자재료 |
| 제목 |
Study of electrical enhancement by multi-wall carbon nanotube incorporation into direct-patternable SnO2 thin films |
| 초록 |
Tin dioxide (SnO2) has attracted attentions as a transparent conducting oxide of solar cell and transparent devices. For applying to electrical devices, an improvement in the electrical property of SnO2 thin film has been absolutely required. Recently, the hybridization with carbon nanotube has been widely investigated for an enhancement of the electrical property. Furthermore during patterning by lithographic process using photoresist, thin films receive surface damages and degradation of properties. In this work, multi-wall carbon nanotubes were incorporated into SnO2 thin films to improve the electrical property of the film and direct patterning of the films was carried out through photochemical metal-organic deposition using photosensitive precursors without photoresist and dry etching. For direct-patterning of film, spin-coated films were simply exposed to UV through shadow mask. X-ray diffraction was served to provide the information of crystalline structure. The electrical and optical properties were investigated by using four-point probe and UV-VIS-NIR spectrophotometer, respectively. Photoelectron spectroscopy was used for the surface chemical bonding state, valence band spectrum and secondary cutoff energy of films. |
| 저자 |
Sun Gyu Choi1, Hyung-Ho Park2, Hyuncheol Kim1, A. Sivasankar Reddy2
|
| 소속 |
1Department of Ceramic engineering, 2Yonsei Univ. |
| 키워드 |
transparent conducting oxide; multi-wall carbon nanotube; direct-patterning; photochemical metal-organic deposition
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| E-Mail |
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