| 학회 | 한국고분자학회 |
| 학술대회 | 2002년 가을 (10/11 ~ 10/12, 군산대학교) |
| 권호 | 27권 2호, p.85 |
| 발표분야 | 분자전자 부문위원회 |
| 제목 | Investigation of Porogen Domains Behavior in Porogen/Poly(methylsilsesquioxane) Hybrids |
| 초록 | As feature size shrinks in semiconductor devices, it is expected to replace Al metal and SiO2 to low dielectric materials and Cu metal. Reduction of dielectric constant (k) can be achieved by incorporating pores filled with air (k=1) into electrically insulating matrices such as poly(methylsilsesquioxane) (MSSQ). A final target of templated-porogen base approach is to obtain well distributed pores at the nanoscopic level since mechanical properties in porous low-k correlates with pore size and pore size distribution. In this study, we have investigated star-shaped PCL porogen (P125) domains behavior in MSSQ matrix using thermo gravimetric analysis (TGA) and differential TGA (DTGA). MSSQ/porogen hybrids are prepared as follows: MSSQ/porogen solution is dissolved at 30 wt%/vol% (solid/solvent) and the solvent was evaporated under dynamic vacuum at 30 ℃ for 24 hours to yield the porogen/MSSQ hybrids. When porogen content in hybrids is low, maximum weight loss appears at 410 ℃, which is much higher than that of porogen itself (320 ℃). As porogen content increases, simular weight loss peak to porogen appears which implies that porogen in hybrids is incompatible with MSSQ and porogen domains is increased. |
| 저자 | 민성규1, 박재만2, 송기태3, 송민규4, 진문영*, 이진규**, 윤도영**, 이희우*** |
| 소속 | 1서강대, 2*한국화학(연), 3**서울대, 4***서강대 |
| 키워드 | Porogen Domains; MSSQ |
| VOD | VOD 보기 |
