| 학회 |
한국화학공학회 |
| 학술대회 |
2003년 봄 (04/25 ~ 04/26, 순천대학교) |
| 권호 |
9권 1호, p.1058 |
| 발표분야 |
재료 |
| 제목 |
플라즈마화학증착법으로 제조된 PbTiO3와 PbZrO3 적층박막구조에서의 PZT 형성 |
| 초록 |
From the amorphous multilayer structure composed of PbTiO3 and PbZrO3 thin films by plasma enhanced metalorganic chemical vapor deposition method, the preparation of single phase PZT thin films has been performed by the interdiffusion reaction through an appropriate thermal annealing process. The transformation to a single-phase PZT from the multilayer was initiated at around 450 ℃ and almost completed at 550 ℃ under the fixed time of 1 hr. The electrical properties of the single-phase PZT thin film (Zr/Ti = 54/46, 180 nm) on Pt coated substrate were evaluated. |
| 저자 |
이원규1, 우성일2
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| 소속 |
1강원대, 2한국과학기술원 생명화학공학과 |
| 키워드 |
Ferroelectrics; PZT; PECVD; Multilayer; Interdiffusion
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| E-Mail |
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| 원문파일 |
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