화학공학소재연구정보센터
학회 한국재료학회
학술대회 2016년 봄 (05/18 ~ 05/20, 여수 디오션리조트 )
권호 22권 1호
발표분야 G. 나노/박막 재료 분과
제목 Micro-structured pressure sensor with high sensitivity for real-time sensing
초록 Lately, a great deal of effort has been dedicated to investigate the flexible and stretchable artificial electronic skin (E-skin) that have attracted much attention for various applications such as wearable electronics, human-machine interfaces and advanced robotics. Detection of extremely small amount of external mechanical deformation (under 10kPa) is required to develop E-skin that imitating the function of human skin. Over the few years, piezoelectric, resistive, capacitive and optical types of flexible pressure sensors have been widely explored as excellent candidates for variety of applications in E-skin. Among the aforementioned types of pressure sensors, the capacitive pressure sensors with a micro-structured elastomer which are used as a dielectric layer have been demonstrated due to its high sensitivity and short response time. In nature, there are diverse natural species that has micro scale porous structures with reversible compressibility such as mushrooms, diatoms, and spongia officinalis. Its excellent mechanical properties offer inspiration for fabricating highly sensitive pressure sensor through mimicking their sponge-like morphology.
Here, we fabricated a highly sensitive capacitive type pressure sensor based on elastomeric dielectric layer with sponge-like structure. The micro-structured dielectric layer was demonstrated using an all solution process and the structural morphology were controlled by changing pore sizes. The obtained pressure sensor was able to detect extremely low pressure region and respond at sophisticated pressure stimulus lower than 1kPa. Moreover, real-time tactile array sensing and distinguish varying applied pressures were enabled using large arrays of pressure sensors. The developed flexible pressure sensor may chance to proceed advanced wearable health monitoring or human-machine interfaces and various robotic sensor system.  
저자 강수빈, 이재홍, 이상근, 이태윤
소속 연세대
키워드 <P>electronic skin; pressure sensor; PDMS; sesitivity</P>
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