| 초록 |
Biological sensor using semiconductor nanowire field effect transistors (NWFETs) still suffer from the absence of the cost effective and mass-producible fabrication routes, in spite of a wide range of potential applications. To address these issues, our group have developed a novel fabrication method based on plasma processing of etching and deposition, consisting of sequential processes of metal oxide deposition, nano-imprint lithography, low-damage plasma etching, and non-thermal plasma deposition. This approach is compatible with the conventional semiconductor process. In this work, this platform is extended into needle type biological nanowire sensor for in vivo detection. Finally, we demonstrate that pH and glucose detections are plausible with this platform for various in-vivo applications. |
