| 초록 |
Parylene can fabricate Thin Film Transistor as insulator instead of silicon dioxide. Functional Parylene that has Formyl and Hydroxy groups is polymerization of 4-Formyl-5-Hydroxy-Para[2.2]cyclophane by Chemical Vapor Deposition(CVD). Parylene-CHO,OH expects to improve permittivity by functional groups and also it can improve electronic movement by patterning with parylene crosslinking. We checked that 4-Formyl-5-Hydroxy-Para[2.2]cyclophane be synthesized by FT-IR and NMR data. We coated Parylene on the Si-wafer by CVD and then Si-wafer coated Parylene is exposed to UV. In order to confirm Parylene coating and patterning, we analyzied XPS, FT-IR. |
