| 초록 |
TiO2 was widely recognized as environmental purification material such as photocatalyst because of high reactivity and easy fabrication. In TiO2, photocatalytic efficiency decreases due to recombination of electron-hole pairs. In this study, fabrication process of TiO2 thin film hybridized with SiO2 was introduced to increase photocatalytic efficiency. First, TiO2 sol-gel solution prepared by wet-based chemical reaction was spin-coated on Si wafer. After then, TiO2-SiO2 hybrid thin film was fabricated by thermal annealing and laser irradiation processing on TiO2 sol-gel coated Si wafer. Crystallinity of TiO2-SiO2 hybrid thin film was enhanced for the conventional TiO2 film produced by the annealing process at high temperature. In addition, super-hydrophilic film was fabricated by laser irradiation process. Morphology, crystallinity and contact angle of fabricated films were analyzed by SEM, XRD and DSA 100. Superior properties as photocatalytic material could be secured by introducing noble fabrication method of TiO2-SiO2 hybrid thin film. This investigation of fabrication processing of thin film could be applied to produce the hybrid thin film of various metal oxide. |
