| 초록 |
In this presentation, BCP lithography for three-dimensional, flexible and complex geometry will be introduced. Mechanically robust but compliant chemically modified graphene (CMG) film is utilized as a transferrable and disposable substrate for the BCP nanopatterning for nonplanar, flexible, and even multi-stack structures. Taking advantage of the high chemical/thermal stability, atomic scale flatness, and mechanical robustness with compliance, graphene based materials can be versatile substrates for nanopatterning. While pristine graphene has a low surface energy, CMG prepared from graphene oxide, may have a controllability of surface energy to promote wettability to a BCP thin film. Direct implementation of conventional BCP lithography process on the spin cast CMG film and subsequent transfer onto flexible or nonplanar geometries accomplishes various surface nanopatterned structures on flexible or three-dimensional geometry, including metal nanopatterns stabilized on conventional PET or PDMS substrates. |
