화학공학소재연구정보센터
학회 한국재료학회
학술대회 2018년 가을 (11/07 ~ 11/09, 여수 디오션리조트)
권호 24권 2호
발표분야 G. 나노/박막 재료 분과
제목 Complementary dual channel gas sensor devices based on role-allocated heterostructure
초록 Intriguing electronic properties of graphene related with massless Dirac Fermions have enabled the applications in highly sensitive gas sensors. However, it is widely recognized that the poor gas desorption behavior because gas adsorption occurs defective sites of graphene only. To overcome this insurmountable hurdle, we rationally designed hybrid films including ZnO thin films and CVD-grown graphene in order to combine advantages of ZnO thin films with reliable gas adsorption/desorption related with their gas reaction mechanism and graphene with extremely high gas sensitivity originated from its exceptional electronic structure. The complementary dual channel gas sensor based on roll-allocated graphene-ZnO heterostructures, in which ZnO acts as a gas adsorption channel and graphene plays a role of carrier conducting path, was fabricated by combining atomic layer deposition, chemical vapor deposition, and polymer-assisted wet transfer techniques. The effects of ZnO top-layer thickness on the gas sensing properties of the hybrid films were explored. As a result, NO2 sensitivity improvement of the optimized hybrid film-based gas sensor was achieved unambiguously as ~40 times higher than that of graphene-based gas sensors. Additionally, we systematically explored the electrical interaction between thickness-controlled ZnO thin films and graphene before and after gas adsorption to explain the correlation between charge transfer and gas sensing properties.
저자 Garam Bae1, Wooseok Song2, Sung Myung1, Jongsun Lim2, Sun Sook Lee1, Chong-Yun Park2, Ki-Seok An1
소속 1Thin Film Materials Research Group, 2Korea Research Institute of Chemical Technology
키워드 graphene; znic oxide; heterostructure; gas sensor
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