화학공학소재연구정보센터
학회 한국재료학회
학술대회 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔)
권호 27권 2호
발표분야 G. 나노/박막 재료 분과
제목 Fabrication of WO3/WSe2 Heterostructure via Pulsed Laser Deposition
초록 Two-dimensional transition metal dichalcogenides (TMDCs) have been considered as the appealing candidates for the electronic devices due to their unique structure and properties. Combining TMDCs and transition metal oxides (TMOs) have ignited substantial scientific interest in recent years; the heterostructure comprised of TMDCs and TMOs showed the exotic electronic properties, such as the modified charge transport behavior at the interface. Indeed, tungsten oxides (WO3) are of particular interests among the TMOs, owing to their outstanding physical, electrical properties applicable for the optoelectronic and energy storage devices.  

Here, we investigate capacitance-voltage properties of WO3/WSe2 heterostructure device with top ITO electrode. The WO3/WSe2 heterostructure is realized by pulsed laser deposition PLD technique, which enables the fabrication of large scale TMDCs with a high uniformity and nearly perfect stoichiometric ratio. The crystallinity of the WO3/WSe2 heterostructure is evaluated by Raman spectroscopy and X-ray diffraction spectroscopy.  
저자 이동현, 이상한
소속 광주과학기술원 신소재공학부
키워드 Transition metal dichalcogenides; tungsten diselenide; tungsten oxide; capacitor
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