| 학회 | 한국재료학회 |
| 학술대회 | 2018년 가을 (11/07 ~ 11/09, 여수 디오션리조트) |
| 권호 | 24권 2호 |
| 발표분야 | G. 나노/박막 재료 분과 |
| 제목 | Microwave Induction Heating: A Novel Method of Selective High Temperature Treatment for Conductive Thin Films |
| 초록 | High temperare thermal treatment is a fundamental method to enhance the crystallinity and to recover its instrinsic properties after deposition processes of thin films. However, thermal treatments with high temperature are energy- and time-consuming process to increase production costs. Moreover, the thermal treatments has become an inacceceble technic when the treatment temperature is limited by such as transparent or flexible subtrates. Here, it is introduced the microwave ‘induction’ heating as a selective and fast heating method for conductive thin film. In different with the conventional microwave dielectric heating for electrically polarized molocules, the microwave induction heating has mechanism that strong current induced by oscillating magnetic field in giga-hertz frequency generates ohmic heat in conduction thin film. A 20nm-thick silver thin film sputtered on 5mm-thick glass substrate for low emissivity coating of thermal insulation glass has been selectively heated more than 550oC in 200ms without thermal damage by the microwave induction heating, while the temperature of glass substrate is maintained around room temperature. The surface resistance of the silver thin film is reduced to near 30% due to crystallinity enhancement. |
| 저자 | 김대호 |
| 소속 | 한국전기(연) |
| 키워드 | Microwave; induction heating; annealing; heat treatment; thin film |
