| 학회 | 한국화학공학회 |
| 학술대회 | 2002년 봄 (04/26 ~ 04/27, 강원대학교) |
| 권호 | 8권 1호, p.2237 |
| 발표분야 | 재료 |
| 제목 | 액적화학증착법을 이용한 (Bi,Ce)4Ti3O12(BCT) 박막의 제조 및 특성 분석 |
| 초록 | Ce doped bismuth titanate(BCT) thin films were prepared by liquid source misted chemical depositon. This report characterized BCT films as a function of annealing temperature and thickness by XRD, SEM, hysteresis, fatigue and leakage current density. XRD results showed BCT films were crystalized above 600oC and after annealed at 700oC in furnace and oxygen atmosphere electrical properties were optimized. Leakage current density of 130nm films were greatly improved as the film thickness increased as 180nm. 700oC annealed films of 180nm thickness showed good fatigue endurance until 10^10 cycles and low leakage current at 1V. |
| 저자 | 전민구, 김기웅, 우성일 |
| 소속 | 한국과학기술원 생명화학공학과/초미세화학공정시스템연구센터 |
| 키워드 | ferroelectric thin film; bismuth titanate; Liquid Source Misted Chemical Deposition |
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| 원문파일 | 초록 보기 |
