| 초록 |
Achieving sub-10 nm patterns from BCP self-assembly requires both a high interaction parameter χ and a perpendicular orientation of microdomains. However, these two conditions are very difficult to achieve simultaneously because the blocks in high-χ copolymer typically have very different surface energies, favoring in-plane microdomain orientations. We introduce a generalized method for creating perpendicular orientations by filtered plasma treatment on the BCP films. By cross-linking the surface of disordered BCP films using only physical collisions of neutral species without ion bombardment or vacuum-UV/UV irradiation, neutral layers consistent with the BCP volume fraction are produced which form the perpendicular orientations. This method works with BCPs of various types, volume fractions, and molecular weights individually at the top and bottom interfaces, so it was applied to orientation-controlled 3D multilayer structures and DSA processes for sub-10 nm line-spacing patterns. |
