| 학회 |
한국재료학회 |
| 학술대회 |
2018년 가을 (11/07 ~ 11/09, 여수 디오션리조트) |
| 권호 |
24권 2호 |
| 발표분야 |
E. 환경/센서 재료 분과 |
| 제목 |
Boron nitride nanotubes (BNNTs) decorated Pd-ternary alloy (Pd63.2Ni34.3Co2.5) for H2 sensing |
| 초록 |
A facile method is designed and fabricated for the MEMS based dual-gate FETs having embedded microheater and the gate electrode was modified by boron nitride nanotubes (BNNTs) decorated Pd-ternary alloy (Pd63.2Ni34.3Co2.5) for H2 sensing application. Electrothermal properties of the embedded micro-heater embedded inside the sensing platform was studied by finite element method (FEM) simulations. Structural and morphological properties of the gate electrode was studied by Raman spectroscopy and field emission scanning electron microscopy (FESEM). A variation in gate potential is observed due to the H2 atmosphere that leads to the variation in the depletion region, therefore changing the current in n-channel (BNNTs decorated Pd-ternary alloy). The BNNTs decorated Pd ternary alloy displays high sensor response, good linear response with H2 concentration, low power consumption, long-term stability, and a broad range of detecting H2 concentrations from 1 ppm to 5000 ppm. As proposed H2 FET sensors can be utilized for H2 leak detection system to make H2 energy system secure and safe for other applications. |
| 저자 |
Bharat Sharma, Jung Sik Kim
|
| 소속 |
Univ. of Seoul |
| 키워드 |
MEMS; boron nitride nanotubes (BNNTs) decorated Pd-ternary alloy; sensor response; FET sensors <BR>
|
| E-Mail |
|
