| 학회 |
한국고분자학회 |
| 학술대회 |
2010년 가을 (10/07 ~ 10/08, 대구 EXCO) |
| 권호 |
35권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Fabrication of High Aspect Ratio Nanoporous Template Using Silicon-Containing Block Copolymer and High Density Au Nanopillar Arrays |
| 초록 |
Well defined nanoporous templates with high aspect ratios are highly desirable for a variety of applications. In this study, we combined bilayer approach with block copolymer (BCP) lithography. This system consists of a top Si-containing BCP layer and an underlying SU-8 layer into which the nanopatterns from BCP are transferred by O2-RIE. This nanoporous template can be applied to the fabrication of high density Au nanopillar arrays using an e-beam evaporation process. The details of results will be described. |
| 저자 |
구세진, 박창홍, 백연경, 정희태, 김진백
|
| 소속 |
한국과학기술원 |
| 키워드 |
silicon; block copolymer; nanoporous template; high aspect ratio; gold nanopillar array
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| E-Mail |
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