| 학회 | 한국재료학회 |
| 학술대회 | 2003년 가을 (11/21 ~ 11/22, 연세대학교) |
| 권호 | 9권 2호 |
| 발표분야 | 반도체 |
| 제목 | Pd와 Ni의 혼합물을 촉매로 이용한 금속 유도 측면 결정화에 관한 연구 |
| 초록 | It has been known that Pd-MILC shows much faster and lower temperature crystallization than Ni-MILC but it can not be put into practice due to the quality issue of thus fabricated poly crystals. In this study, addition of Pd into Ni-MILC has been attempted in order to take advantages of the Pd-MILC without sacrificing of the Ni-MILC TFTs. It turns out that when 5% of Pd has been added to Ni for MILC, MILC growth rate increases two – three times faster than pure Ni-MILC. The MILC growth rate shows monotonic increase with increase the amount of Pd in Ni up to 50%. Even when small amount of Pd was added to Ni like 5%, crystallization phenomenon already follows the way of Pd-MILC. The Poly-TFT thus fabricated shows lower leakage current than pure Ni-MILC TFT without losing any amount of on-current. This fact is very important in low temperature poly-TFTs because MILC-TFTs, especially suffer from the relatively high leakage current. The results, we believe, definitely open the possibility of formation of poly TFTs on the plastic substrate in a near future and the details of the electrical properties of TFTs as well as crystallization phenomenon of mixed metal induced lateral crystallization will be presented. |
| 저자 | 최성희, 윤여건, 주승기 |
| 소속 | 서울대 |
| 키워드 | Pd-MILC; Ni-MILC |
