| 초록 |
In the amorphous metal oxide, a polyhedral unit structure (M, O, X) has better advantages of freedom and flexibility than a unit structure in a crystalline phase. However, it is not easy to regulate photonic and acoustic energy through only thermal annealing while maintaining ITO’s initial amorphous state and preventing mechanical problems on the surface of films such as polyimide. To solve this problem, a flash lamp annealing process was applied Newly. Through extended X-ray absorption fine structure (EXAFS) analysis, we can confirmed that a flash annealing process could be improved by forming oxygen vacancies in the amorphous metal oxide network Effectively. It could be improved by electrical properties about ITO on polyimide thin film. This research can pave the novel way for transparent electrodes to high-quality flexible ITO and enable to produce amorphous metal oxides suitable for rapid capable of fast, economical, and patterning on plastic substrates. |
