| 학회 |
한국재료학회 |
| 학술대회 |
2011년 가을 (10/27 ~ 10/29, 신라대학교) |
| 권호 |
17권 2호 |
| 발표분야 |
E. Structural Materials and Processing Technology(구조재료 및 공정기술) |
| 제목 |
The characterization of ZnO hybrid structure grown by metal-organic chemical vapor deposition |
| 초록 |
The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure. Vertically aligned ZnO nanorods were grown on c-plane sapphire substrate at 600℃ and 400 Torr. ZnO film was then formed in-situ on the ZnO nanorods at 600℃ and 10 Torr. High-resolution X-ray diffraction and transmission electron microscopy measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 5 μm by field-emission scanning electron microscopy. The hybrid structure showed better crystalline quality than mono-layer film on sapphire substrate. Consequently, purpose of this work is developing high quality hybrid epi-growth technology using nano structure. These structures have potential applicability as nanobuilding blocks in nanodevices. |
| 저자 |
김아영, 장삼석, 이도한, 임소영, 변동진
|
| 소속 |
고려대 |
| 키워드 |
ZnO; Hybrid structure; nanorods; Epitaxial growth; MOCVD
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| E-Mail |
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