초록 |
The self-assembly of Block copolymer has been attracted great attention due to their potential applications. In particular, block copolymer micelles that are formed from amphiphilic diblock copolymer in selective solvent have wide range of application feasibility such as drug delivery, nano-reactors, nano-lithography, etc. Sohn and coworker demonstrated that highly-ordered hexagonal arrays of block copolymer micelles can be fabricated from solvent annealing method. However, hexagonal arrays are not compatible with design standards of semiconductor integrated circuits. In this regards, a few groups successfully fabricated square arrays from block copolymer thin films. However, some complex processes such as prepatterning of substrate or precise synthesis of block copolymer are required. In this work, we demonstrate that highly-ordered square arrays of micelles can be obtained by adding PS additive. |