| 초록 |
Alkylene bridged-silane copolymers, especially ethylene bridged copolymers, have been reported to show high modulus, hardness and crack resistance up to 1.5 μm as an outstanding low-dielectric material. So, in this study we investigated the effect of incorporating various bridged comonomers such as methylene, ethylene, propylene and hexylene bridges on the structure and properties of poly(methylsilsesquioxane)(PMSSQ)/bridged silsesquioxane copolymer films. The microstructures and physical properties were analyzed by matrix-assisted laser desorption/ionization time-of-flight mass spectrometry (MALDI-TOF MS), Fourier transform infrared spectroscopy (FT-IR), capacitance-voltage (C-V) measurement, filmetrics and nanoindentation experiments. The MALDI-TOF MS results show the presence of partial-cage structured species containing bridged-silane comonomers. Moreover, different bridged-silane comonomers significantly affect the physical properties PMSSQ copolymer films. |
