화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2002년 봄 (04/12 ~ 04/13, 서울대학교)
권호 27권 1호, p.312
발표분야 특별 심포지엄
제목 Preparation of Processible Polysilsesquioxane Terpolymers for LSI Interlayer Dielectrics with Low Dielectric Constant
초록 In order to improve the mechanical and dielectric properties of polymethylsilsesquioxane (PMSSQ) films, processible polysilsesquioxane terpolymers have been prepared in refluxing THF solutions under nitrogen atomosphere in the presence of HCl catalyst. Methyltrimethoxysilane (MTMS), Dimethoxydimethylsilane (DMDMS) and 1,2-Bis(Trimethoxysilyl)ethane (BTMSE) were used as monomers. We have synthesized terpolymers by changing the composition of three monomers, that is, MTMS, DMDMS and BTMSE. In this study, we will focus on the terpolymers whose compositional ratios are 7:2:1 (MTMS:BTMSE:DMDMS) and 8:1:1. The extent of reaction was affected by the molar ratios of catalyst/monomers (R1), water/monomers (R2), concentration and reaction time. The amount of functional end groups and the amount of monomers contributing to the polymerization could be elucidated by 1H-NMR. The relative molecular weights were measured by GPC. The terpolymers exhibit excellent mechanical and dielectric properties, much better than those of PMSSQ homopolymer.
저자 김형은1, 노현욱2, 김운천3, 이진규, 차국헌*, 이희우**, 윤도영
소속 1서울대, 2*서울대, 3**서강대
키워드
E-Mail