화학공학소재연구정보센터
Filtration & Separation, Vol.43, No.5, 22-25, 2006
Ultrapure water: systems for microelectronics
Of all the potential sources of contamination in microelectronics manufacturing, water is the most significant - being necessary at different stages of the production process. John Hutcheson of Hutch(2)O looks at how this potential problem can be avoided.