The effects of water exposure on InZnSnO transparent thin films are reported. After the immersion of InZnSnO films under de-ionized water, an enrichment of In (and Sn) and a reduction of Zn are found on the surface, probed with X-ray photoelectron spectroscopy (XPS). In addition, O 1s core-level XPS spectra show a presence of hydroxyl after the water immersion process, supporting that the adsorption of H(2)O to InZnSnO surface may induces partial negative charge to surface with either molecular to hydroxyl forms. (C) 2010 Elsevier B.V. All rights reserved.