To study the anisotropic electric transport properties of Copper-(II)-Phthalocyanine (CuPc) thin films we measured the conductivity of a CuPc organic field-effect transistor using a near-field scanning microwave microscope by measuring the microwave reflection coefficient S(11). The orientation of grains depended on the heat-treatment condition and the temperature of the substrate during film deposition. The field-effect mobility of the CuPc thin film annealed at 300 degrees C was increased about 5 times compared to the film formed at room temperature and 17 times larger than that prepared by deposition at 300 degrees C. (C) 2010 Elsevier B. V. All rights reserved.