Gold nanoparticles (AuNPs) have been arranged on a nanotemplate prepared on indium tin oxide substrate. This template, consisting of circular areas of about 200nm in diameter hexagonally assembled with an interval of 450 nm, was prepared by using an anodic porous alumina membrane mask and vacuum ultraviolet light at 172 nm. The site-selective immobilization of AuNPs was controlled with the electrostatic affinity difference of AuNPs toward functionalized surface characterized by self-assembled monolayer.