From the analysis of IR spectra of double layer structures after KCN passivation the presence of four absorption bands at 720-810 cm(-1) (assigned as Si-C bond), 870-1060 cm(-1) (assigned as Si-H-n and Si-O bonds), 1930-2200 cm(-1) (assigned as Si-H-n bonds) and absorption band around 2360 cm(-1) (assigned as Si-NCO bond) was found. As IR spectra between 1400 and 1600 cm(-1) (assigned as C-H, NH2) and 3200-3300 cm(-1) (assigned as C-H and N-H) under influence of KCN passivation did not change we suggest that formation of HCN, CH and NH was eliminated (polymeric HCN). From analysis of absorption bands assigned as Si-H-n, CN and SiNC (1950-2200 cm(-1)) and absorption bands assigned as Si-O bond (1000-1200 cm(-1)) it is evident the different influence of passivation on samples and . In the spectra typical features of OH group, hydrogen bridge bonding and Si-Si-OCN formation were observed. From these results can be drawn the binding of CN to Si through oxygen atoms. (c) 2012 Elsevier B.V. All rights reserved.