A new method to improve (00 1) texture of L1(0) FePt films was reported. In this work, in order to obtain the perpendicular orientation of L1(0) FePt films, the FePt films were annealed at 700 degrees C (T-A1) for 30 min and then annealed at T-A2(430-600 degrees C) for an hour either in a magnetic field of similar to 3500 0e along the normal direction of the films (Route A) or without magnetic field (Route B). Compared with the Route B, I ((0 0 1))/I((1 1 1)) showed a peak value of 7 when T-A2 was around 478 degrees C (around the Curie temperature of L1(0) FePt films, the thermal disturbing term is close to the exchange energy of the magnetization, therefore, the magnetic field of similar to 3500 0e is effective for promoting the preferential growth direction of L1(0) structure. (C) 2012 Elsevier B.V. All rights reserved.