Carbon nanomaterials with different structures were prepared in a custom-designed plasma-enhanced hot filament chemical vapor deposition system using methane, hydrogen and nitrogen. They were investigated by scanning electron microscopy (SEM) and micro-Raman spectroscopy. The SEM images show that the smooth carbon nanotips are formed under a high bias current and the carbon fractals can grow from the tips of the carbon nanotips under a low bias current. The results of micro-Raman spectroscopy indicate that the graphitization of the carbon nanomaterials was improved by ion bombardment. Combined the ion bombardment, electric field enhancement and electron emission mechanisms, the formation model of the carbon fractals was suggested. (C) 2011 Elsevier B. V. All rights reserved.