Highly ordered CuInSe2 films with hollow nanocones were fabricated by electron beam evaporation and nanospheres lithograph. From the AFM analyses, polystyrene nanospheres with diameter of 220 nm are assembled regularly on glass substrates. After reaction ion etching under different powers and residues removal, different and new surface morphologies of substrates have been obtained, such as smooth nanocones and hollow nanocones. The diffuse reflection spectra demonstrate that films on the substrates with periodic nanopatterned structure have less reflection over wavelengths ranged from 200 nm to 2500 nm due to light trapping. Especially, reflection for hollow nanocone arrays has the larger suppression value than nanocone-patterned films, which proves that surface pattern of hollow nanocones has better anti-reflection effect. Furthermore, while hollow depth increases from 6 nm to 9 nm, its optical antireflective effect becomes remarkable. These results could yield new options for solar-cell design with higher energy conversion efficiency. (C) 2011 Elsevier B.V. All rights reserved.