ZnO nanomaterials with their unique semiconducting and piezoelectric coupled properties have become promising materials for applications in piezotronic devices including nanogenerators, piezoelectric field effect transistors, and diodes. This article will mainly introduce the research progress on piezotronic properties of ZnO nanomaterials investigated by scanning probe microscopy (SPM) and ZnO-based prototype piezotronic nanodevices built in virtue of SPM, including piezoelectric field effect transistors, piezoelectric diodes, and strain sensors. Additionally, nanodamage and nanofailure of ZnO materials and their relevant piezotronic nanodevices will be critically discussed in their safe service in future nanoelectromechanical system (NEMS) engineering.