Coating dies uniformly distribute liquid for application as a film to moving substrates using one or two cavities spanning the coating width and adjoining precision narrow slots of much higher resistance to flow. If the slots are deformed by the pressure of the liquid or by temperature gradients in the die bars, degradation in flow distribution can result. Consequently, dies are designed to be sufficiently stiff and are thermally jacketed to keep slot deformations within fabrication tolerances. To aid in design and operation, a model of low computational load is developed in which the flow and deformation analyses are directly coupled. Die deformation is modeled using classical beam theory taking account of the varying thickness of the bars due to cavity geometry. Two-dimensional finite element analysis of die deformation gives marginally higher slot deformation. Three-dimensional finite element analysis agrees with the two-dimensional analysis except near the center of the die where the symmetry boundary condition reduces deformation. The effects of die geometry on deformation and flow distribution are illustrated. POLYM. ENG. SCI., 2012. (C) 2011 Society of Plastics Engineers