화학공학소재연구정보센터
Materials Chemistry and Physics, Vol.132, No.2-3, 494-499, 2012
Micro Raman analysis of MOCVD grown gallium nitride epilayers irradiated with light and heavy ions
We have investigated the micro Raman spectra of pristine and 100 MeV swift heavy ions namely oxygen and silver ions, irradiated at fluences of 1 x 10(12) and 1 x 10(13) ions cm(-2) on metal organic chemical vapor deposition (MOCVD) grown GaN epilayers. X-ray diffractometer (XRD) confirmed the wurtzite nature of GaN. Pristine Raman spectra show the good quality of epilayers. On irradiation with light ion, O7+, the order of defects increases and the annealing or ordering of defects occurs in the crystal at higher fluencies. For heavy ion, Ag12+, irradiation results in the increase of disorder for all fluences. A Lorentzian line shape model has been fitted to the Raman spectra of optical phonon mode of E-2(H) (high) and A(1) (LO) peaks. Biaxial stress (sigma), carrier concentration (n) and phonon life-time of first order optical phonon (tau) are deduced from the Raman shift of E-2(H) (high) and A(1) (LO) mode for all the irradiated samples. While with light ion irradiation, sigma deceases where as n and tau increases and for heavy ion irradiation sigma and n increases and tau decreases. (C) 2011 Elsevier B.V. All rights reserved.