Low cost deposition of large area CuInSe2 (CIS) thin films have been grown on Mo-coated glass substrate by simple and economic stacked elemental layer deposition technique in vacuum. The grown parameters such as concentration of Cu, In and Se elements have been optimized to achieve uniform thin film in vacuum chamber. The as-grown Cu/In/Se stacked layers have been annealed at 200 degrees C and 350 degrees C for 1 h in air ambient. The as-grown and annealed films have been further subjected to characterization by X-ray diffraction (XRD), optical absorption, atomic force microscopy (AFM) and I-V measurement techniques. XRD patterns revealed that as-grown Cu/In/Se stacked layers represent amorphous nature while annealed CIS film reproduces nano-polycrystalline nature with chalcopyrite structure. The optical band gap of annealed films increases with respect to air annealing which confirms the reduction of crystallite size. Surface morphology of as-grown Cu/In/Se stacked layers and annealed CIS thin films have been confirmed by AFM images. The electrical measurements show enhancement of conductivity which is useful for solar cell application. (C) 2011 Elsevier B.V. All rights reserved.