Antireflection titanium dioxide (TiO2) coatings have been developed on monocrystalline silicon by a sol-gel spin-coating process using titanium di-isopropoxidebis(acetylacetonate) colloidal precursor solution. The effect of titanium content in the precursor, spin rate, sintering duration and temperature have been studied and their effect on coating thickness and optical properties (i.e., refractive index and reflectivity) were investigated. The influence of post-deposition sintering temperature on the optical characteristics, composition and the microstructure of the coatings have been evaluated by UV-vis spectroscopy, ellipsometry, X-ray photoelectron spectroscopy, atomic force microscopy and X-ray diffraction techniques. Solar cells made on silicon wafers with TiO2 as antireflection layer showed enhancement of more than 20% in short circuit current density in comparison to a cell devoid of the TiO2 coating. (C) 2011 Published by Elsevier B.V.