Methane-fueled thin film micro-solid oxide fuel cells (mu SOFCs) based on palladium (Pd) anodes are discussed in this article. The mu SOFCs are composed of porous platinum (Pt) cathodes, 8 mol.%yttria-stabilized zirconia (YSZ) ultrathin electrolytes, and Pd anodes - specifically, a Pt/YSZ/Pd heterostructure synthesized by physical vapor deposition. The Pt/YSZ/Pd mu SOFCs exhibit a power density of 385 mW cm(-2) and an open circuit voltage of 0.77 V at 550 degrees C. A detailed study on synthesis, microstructure and functional properties of the nanoporous Pd films is presented. Possible anodic methane reactions, carbon deposition on Pd anodes, and carbon suppression approaches are discussed. The results are of potential relevance to advancing low temperature micro-fuel cell technology using hydrocarbon fuels. (C) 2011 Elsevier B.V. All rights reserved.