Atomization energies at 0 K and heats of formation at 0 and 298 K are predicted for the MHxCly compounds (M = Si, P, As, and Sb) and for a number of trivalent, tetravalent, and pentavalent fluorides (SbF3, BiF3, GeF4, SnF4, PbF4, AsF5, SbF5) from coupled cluster theory (CCSD(T)) calculations using correlation consistent basis sets and extrapolation to the complete basis set limit. Small-core, relativistic effective core potentials were used for the heavier elements (Ge, As, Sn, Sb, Pb, and Bi), including correlation of the outer core electrons. Additional scalar relativistic (for the lighter elements) and atomic spin-orbit corrections are included in order to achieve near chemical accuracy of +/- 1.5 kcal/mol. Vibrational zero point energies were computed from scaled harmonic frequencies at the second order Moller-Plesset perturbation theory (MP2) level where possible. Agreement between theory and the available experimental data is excellent. We present a revised heat of formation of the antimony atom in the gas phase. The calculated values will be of use in predicting the behavior of chemical vapor deposition systems.