화학공학소재연구정보센터
Journal of Crystal Growth, Vol.348, No.1, 80-84, 2012
Improving the purity of GaN grown by the ammonothermal method with in-autoclave gas-phase acidic mineralizer synthesis
In-autoclave synthesis of a gas-phase acidic mineralizer was investigated for high-purity GaN growth by the ammonothermal (AT) method. To reduce oxygen contamination of GaN from highly hygroscopic NH4Cl powder, purified NH3 and HCl gases were introduced sequentially fed into a Pt-lined autoclave to synthesize NH4Cl within the autoclave. The autoclave was pre-charged with GaN seed wafers and polycrystalline precursors, and carefully dehydrated under dynamic vacuum. Because of the decrease in oxygen concentration, the lattice parameter approached the intrinsic value. The Ga-polar layers exhibit a near-band-edge emission peak at room temperature. (C) 2012 Elsevier B.V. All rights reserved.