Ferromagnetic Ge(1-x)Mn(x)Te is a promising candidate for diluted magnetic semiconductors because solid solutions exist over a wide range of compositions up to x(Mn) approximate to 0.5, where a maximum in the total magnetization occurs. In this work, a systematic study of molecular beam epitaxy of GeMnTe on (1 1 1) BaF(2) substrates is presented, in which the Mn concentration as well as growth conditions were varied over a wide range. The results demonstrate that single phase growth of GeMnTe can be achieved only in a narrow window of growth conditions, whereas at low as well as high temperatures secondary phases or even phase separation occurs. The formation of secondary phases strongly reduces the layer magnetization as well as the Curie temperatures. Under optimized conditions, single phase GeMnTe layers are obtained with Curie temperatures as high as 200 K for Mn concentrations close to the solubility limit of x(Mn)=50%. (C) 2010 Elsevier B.V. All rights reserved.