Si-Ge-Mo composites are prepared using an RF/DC magnetron sputtering method, and their potential use as anode materials for rechargeable lithium-ion batteries is investigated. The Si-Ge-Mo composite films present an amorphous structure. The reaction mechanism of the Si-Ge-Mo with Li is investigated by various analytical techniques. The fabricated Si-0.41 Ge0.34Mo0.25 composite film shows excellent electrochemical properties, including a high energy density (1st charge: 1193 mAh g(-1)), long cycleability (ca. 870 mAh g(-1) over 100 cycles), and good initial Coulombic efficiency (ca. 96%). Additionally, when coupled with a LiCoO2 cathode, the Si0.55Ge0.22Mo0.23 composite electrode used as an anode shows excellent cycleability with a high energy density. The excellent electrochemical properties demonstrated by the Si-Ge-Mo composite film electrode confirm its potential as an alternative anode material for lithium-ion batteries. (C) 2011 Elsevier Ltd. All rights reserved.