We fabricated solution-processed zinc tin oxide (ZTO) TFTs with sol-gel organic-inorganic hybrid passivation layers owing to their solution-processibility and good water and oxygen barrier property. The sol-gel organic-inorganic hybrid passivation layers reduce hysteresis of the TFTs without deterioration of performance. The gate bias stability and the environmental stability under high temperature and relative humidity are also improved compared to unpassivated and poly(methyl methacrylate) (PMMA) passivated TFTs. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3603845] All rights reserved.