Yttrium doped zirconia (YSZ) film was deposited on poly-crystalline 10 at.% samaria doped ceria (SDC) and YSZ plate (doped with 8 at.% yttria) by electron beam evaporation deposition. For electrolyte application in solid oxide fuel cells, YSZ can be used with SDC and act as an electron barrier. The conductivity of YSZ and SDC was measured after sintering at 1000 degrees C. Results indicated that YSZ film became columnar structure, and a new layer formed between the YSZ film and SDC, due to the inter-diffusion between zirconium ions and cerium ions. (C) 2011 Elsevier B. V. All rights reserved.