Surface plasmon coupled light emission of silicon-rich silicon nitride (SRSN) was investigated as a function of metal island size. It was found that the emission intensity was enhanced by surface plasmon (SP) and the enhancement factors increase greatly with the increase of metal island size. Moreover, SP coupled emission spectral shape was found also correlating with Ag island size. By calculating the extinction characteristics of the Ag islands, it was believed that SP scattering and absorption efficiency of the metal islands decide the photoluminescence (PL) changes including emission intensity enhancement and band position shift. (C) 2011 Elsevier B. V. All rights reserved.