Polymerized n-octadecylsiloxane (PODS) was prepared by coating glass substrates with liquid ocatdecyl-trichlorosilane (OTS) followed by dipping-in a solvent. The morphology control of PODS was investigated by the post curing temperature as well as the use of different solvents. The resulting substrates were characterized by scanning electron microscopy (SEM), contact angle measurements, and wide angle X-ray diffractometry (XRD). It is shown that both post curing temperature and extracting solvents affect the morphology of PODS. The temperature dependent morphology was investigated and is ascribed to the physiochemical properties of PODS. For the solvent-dependent morphology, it is proposed that the solvation capability of a solvent to OTS and the presence of a hydrophilic/hydrophobic interface are critical in the PODS morphology. This paper shows the controlling parameter and possible explanation in the crystallinity and wettability of PODS films, which may be useful to other silane-based systems. (C) 2010 Elsevier B.V. All rights reserved.