The combine influence of substrate temperature and bias on microstructure and mechanical properties of CrSiN film was examined. The silicon content and phase constitutions of the films are independent on substrate temperature and bias. The crystal preferred orientation is controlled by substrate bias but unrelated to substrate temperature. The influence of bias (0V to -300 V) on hardness is more obvious than that of the substrate temperature (100-500 degrees C). (C) 2010 Published by Elsevier B.V.