화학공학소재연구정보센터
Advanced Materials, Vol.23, No.24, 2706-2710, 2011
Fabrication of Site-Controlled Quantum Dots by Spatially Selective Incorporation of Hydrogen in Ga(AsN)/GaAs Heterostructures
A novel nanofabrication method based on nitrogen passivation by hydrogen in GaAsN is presented. This approach combines a masked hydrogenation process with a very sharp H forefront in GaAsN. This allows embedding a GaAsN nanometer-sized region in a GaAs barrier, resulting in the formation of ordered arrays of nanoemitters with marked zero-dimensional spectroscopic characteristics.